Cryopumps

Cryopumps are gas entrapment vacuum pumps for the pressure range from 10-3 to < 10-11 mbar (0.75 x 10-3 to ≤ 0.75 x 10-11 Torr). The principle of operation is that gaseous substances are bound to the cold surfaces within the pump by means of cryocondensation, cryosorption or cryotrapping. In order to be able to produce a high or ultra high vacuum the cold surfaces (cryopanels) must be cooled to a sufficiently low temperature. Depending on the type of cooling system used a difference is made between refrigerator cryopumps, bath cryopumps and evaporator cryopumps.